Journal of Engineering and Applied Science

Table 6 Values of growth rate G for some values of Z_max

From: Numerical calculation of temperature, velocity, and species concentration distributions in a hot filament chemical vapor deposition in a reactor using a CH₄/H₂ mixture

Growth (μm/h)	n = 3 Z_max = 20 mm U₀ = 10 mm/s	n = 4 Z_max = 20 mm U₀ = 10 mm/s	n = 4 Z_max = 16 mm U₀ = 8 mm/s	n = 4 Z_max = 12 mm U₀ = 6 mm/s
G_CH3	2.20×10⁻³	2.21× 10⁻³	2.06×10⁻³	1.88×10⁻³
G_C2H5	1.13×10⁻²	1.29×10⁻²	1.05×10⁻²	9.80×10⁻³
G=G_CH3+G_C2H5	1.35×10⁻²	1.51×10⁻²	1.22×10⁻²	1.15×10⁻²

Back to article page