Skip to main content

Table 5 Effect of distance filaments-substrates on concentrations for n = 4

From: Numerical calculation of temperature, velocity, and species concentration distributions in a hot filament chemical vapor deposition in a reactor using a CH4/H2 mixture

 

Zmax = 12 mm

U0 = 6 mm/s

Zmax = 16 mm

U0 = 8 mm/s

Zmax = 20 mm

U0 = 10 mm/s

Umax,zmax/2 (mm/s)

15.37

15.20

14.96

Tmin, zmax/2 (K)

549.19

576.64

602.84

CCH3,av,zmax/2 (m−3)

3.60×1015

3.89×1015

4.41×1015

CCH3,av,z = 0 (m−3)

4.41×1015

4.81×1015

5.20×1015

CH,av,zmax/2 (m−3)

1.83×1015

1.74×1015

1.61×1015

CH,z = 0 (m−3)

1.46×1015

1.36×1015

1.28×1015

CC2H5,av,zmax/2 (m−3)

6.58×1016

7.40×1016

9.77×1016

CC2H5,av,z = 0 (m−3)

2.50×1016

2.70×1016

3.40×1016