Table 1 Values of parameters used for the reactor
Parameter | Typical values |
|---|---|
Filament temperature (K) | 2100 |
Substrate temperature (K) | 1173 |
Initial temperature of gas (K) | 300 |
Pressure (Pa) | 1000 |
Inlet velocity (mm s−1) | 10 |
Length of the reactor in the x direction (mm) | 240 |
Distance between substrates (mm) | 20 |
Distance between three filaments (mm) | 50 |
Distance between four filaments (mm) | 33.3 |
Inlet gas composition CH4/H2 | 05–95% |