Numerical calculation of temperature, velocity, and species concentration distributions in a hot filament chemical vapor deposition in a reactor using a CH4/H2 mixture

Khelef, Nour; Khelfaoui, Fethi; Babahani, Oumelkheir

doi:10.1186/s44147-022-00121-4

Journal of Engineering and Applied Science

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Last updated: Thu, 18 Apr 2024 22:21:27 Z

Numerical calculation of temperature, velocity, and species concentration distributions in a hot filament chemical vapor deposition in a reactor using a CH₄/H₂ mixture

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